Semiconductor & MEMS Foundry

Corporate

Investor Relations

Manufacturing Production

Teledyne DALSA has supplied specialized wafers and device fabrication to a wide range of fabless and IDM organizations for more than 25 years. We operate over 41000 square feet / 3800 m² of clean rooms 24/7and deliver over 100000 wafers per year. With a technology portfolio as wide and flexible as ours, with deliverables as varied as ours, excellence in planning, quality assurance, and customer interaction are not optional activities—they are fundamental business requirements. Only through the dedication of our engineers, technicians, and operators to exceptional project management, comprehensive resource planning, rigorous quality methodologies, and devoted customer communication have we achieved our global reputation for success.

Similarly, with our wide range of clients, dedication to confidentiality is paramount. Teledyne DALSA Semiconductor is proud of its reputation in assuring customer confidentiality and protecting customer intellectual property.

Equipment

One of the ingredients in high-quality production is high-quality equipment. Teledyne DALSA Semiconductor is well-equipped with high-performance, highly reliable equipment including the following:

FSI acid processors
BTI BDF41 horizontal furnaces
TEL & AIO tracks
Canon MPA projection aligners
Canon FPA G-line steppers
EV620 double side aligner
Extrion 8250 medium current implanter
Applied Materials 9200-9500 high current implanters
Applied Materials AME5000 etchers
Matrix 303 oxide etchers
Matrix 105 & Gasonic Aura1000 strippers
Novellus Concept One PECVD
Novellus M2I sputter
Tazmo SOG tracks

AG Associates RTP
KLA-Tencor 6420 particle counter
KLA AIT defect recognition
KLA 2139 defect recognition
KLA-Tencor 7700 defect monitoring
KLA AIT defect recognition
KLA 2139 defect recognition
KLA-Tencor FT-750 interferometer
Nicolet magna 550 FTIR
Digital Atomic Force Microscope
JEOL & Philips SEM equiped with X-ray spectrometer
Keithley S900 Parametric testers
LTX 77 Test Systems
ASML I-line aligners

Direct wafer bonding
Eutectic wafer bonding
Deep reactive ion etching
Vapor HF etch
Low stress structural polysilicon
Low stress structural nitride
Grind and polish
Precision dicing
Thick polymers photolithography
TMAH etch
KOH etch

Production control

One of the keys to our award-winning foundry is our outstanding production control.

Process flows are 100% integrated in Promis (Process Management Integration System), allowing paperless manufacturing and 100% traceability.
Line balancing is done through a KANBAN system
Real time shop floor dispatching system (ORDOJAT software based on Promis) is used at all stages of the process. This system allows a very tight control over On Time Delivery, one of the reasons we received Motorola foundry of the year award for 2001 and Gold Performance Awards in 2000 and 2001.
Very flexible production line allowing simultaneous fabrication of hundreds of different products and processes. Priority levels can be used to expedite rush orders.
SPC monitoring is 100% integrated on Promis and is used at all critical steps.
Automatic recipe download is used at many steps in the process (Furnace, Ion implanters, Acid bath controller, Plasma etcher, PECVD, Steppers) to reduce operation errors and increase line yield.

Product Engineering Support

Our product engineering support includes these services:

Microanalytical Services for NPI
Product Characterization
Product Reliability Qualification
Characterization and Production Test Program Development for Mixed Signal Products
Test Program Transfers
Manufacturing Process Adjustment to meet Product Specifications Requirements (data distribution)